http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-387058-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1997-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1aaa7dcf5b7906cf8ef688fbe81e6453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d2c6e8c52fb5721ad2ae0f2c1ce9257 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ea06697e8ab44d7446e23053529acf7 |
| publicationDate | 2000-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-387058-B |
| titleOfInvention | Am apparatuas for analyzing a sample semiconductor solution and a method for controlling the apparatus |
| abstract | Disclosed is an apparatus for analyzing a sample solution for detecting a very small of amount of ion impurities in a sample solution and a method of controlling the apparatus. The apparantus comprises a channel selecting valve 13 which is connected between a sample vessel 10 and positive or negative ion detector and provided to selectively supply a sample solution from the vessel 10 to the positive or the negative ion detector in response to a control signal CS1 from a controller 1. A loading solution used during the sample loading step, the filled sample solutions are pushed up out of the sample loop line to the conductivity detector 40 by loading solutions pumped by a pump. After the sample loading step, when a new sample solution is again filled from the vessel 10 into the sample loop line 18, a previously loaded loading solution therien is dispensed from the sample loop line 18 indirectly to each outlet line of the positive and negative ion detectors. |
| priorityDate | 1996-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.