http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-367585-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f063b8222ec3c8e746a415e7f364473 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1997-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe0bb2f273cca1ebb1579216f1e6288c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ae8b1e53c7f1a57b15b67fbb3be2934 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd69f54dcabeb21a6d4747e7d7eb41d5 |
| publicationDate | 1999-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-367585-B |
| titleOfInvention | Method for completely removing the titanium nitride residuals outside the integrated circuit contacts |
| abstract | A kind of method for completely removing the titanium nitride residuals outside the integrated circuit contacts which includes the following steps: first, forming an insulation layer on semiconductor substrate; etching the insulation to form contacts; then, forming the titanium nitride barrier and tungsten inside the contacts and on the surface of insulation layer; applying two chemical mechanical polishing to remove the tungsten and titanium nitride barrier exposed outside the contacts; at last, employing the mixed gas plasma of Cl2/HCl for dry-etching to completed remove any titanium nitride residuals outside the contacts. |
| priorityDate | 1997-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.