http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-340877-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f889eb3bd3bea07e88a57bcf54a2c657 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc7a43e1012a9a19a9c72a5fded5fc08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8616785736aec3993f064156c4ef02e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06f9afc7cca980490a7c1ff6382fd575 |
| publicationDate | 1998-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-340877-B |
| titleOfInvention | The method by using plasma chemical to envaporize diamond like carbon |
| abstract | A method by using plasma chemical to envaporize diamond like carbon (DLC) with high adhesion, its steps are as following: Vacuum step, it is vacuum the reaction furnace that has placed envaporized article inside; Heating step, it is heating the reaction furnace into setting temperature; Diffusion step, it is by flowing N2 and H2 into reaction furnace to generate plasma nitridation diffusion reaction, to form nitride diffusion on surface of envaporized article; The junction envaporized step, it is by flowing TiCl4, N2 and H2, to grow TiN on surface of envaporized article; Transition envaporized step, it is by flowing CH4 into reaction furnace, to grow TiCN with well unity on TiN layer; Bonding envaporized step, it stops to supply N2 into reaction furnace, to grow TiC with well adhesion on TiCN layer; Forming diamond like carbon step, it is by cooling down envaporized article, which has envaporized nitride, TiN, TiCN and TiC layer, to 100℃ at H2 environment, then rising the temperature into 150℃, and flowing CH4 and H4, to form diamond like carbon on surface of envaporized article. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110218971-A |
| priorityDate | 1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.