| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_daabfabdb3db3f56b489619c6c7fbdfd |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D9-04 |
| filingDate |
1994-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1996-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1996-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-267186-B |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I691810-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105659167-A |
| priorityDate |
1993-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |