http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202219525-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24519030c1e50e34112a8a3047227a7e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2321-0252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B2321-023 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25B21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04 |
| filingDate | 2021-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcb6b0650f0f6d6235297cdb2893f235 |
| publicationDate | 2022-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202219525-A |
| titleOfInvention | Chuck unit and temperature control method of chuck unit |
| abstract | [Problem] To provide a chuck unit which can set the temperature from below freezing point to high temperature, and can reduce the deterioration of the Peltier module.n [Solution] The chuck unit includes: a chuck 10 for mounting the semiconductor 1; a heater heating unit 11 for heating the back surface of the chuck 10 by a heater 12; a metal block 21 for heating by a contact cooling heater The part 11 is air-cooled or water-cooled; and the Peltier module 31 is used to heat and cool the metal block 21; when the metal block 21 is separated from the Peltier module 31, the heater 12 is energized, and the When the metal block 21 is in contact with the Peltier module 31 , the energization of the heater 12 is blocked. |
| priorityDate | 2020-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 19.