http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202212312-A

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filingDate 2021-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d77141942773d7111cd6a6c9bd6f46df
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publicationDate 2022-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202212312-A
titleOfInvention Resist composition and method of forming resist pattern
abstract A resist composition containing a resin component (A1) having a constitutional unit (a01) and a constitutional unit (a02) derived from compounds each represented by General Formulae (a01-1) and (a02-1), a compound (B1) represented by General Formula (b1), and a compound represented by General Formula (d1-1) or a compound represented by General Formula (d1-2), in the formulae, C<SP>t</SP> represents a tertiary carbon atom, a carbon atom at an [alpha]-position of C<SP>t</SP> constitutes a carbon-carbon unsaturated bond, Wa<SP>02</SP> represents an aromatic hydrocarbon group, and Rb1 represents hydrocarbon group, where a fluorine atom is not contained.
priorityDate 2020-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 42.