http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202202336-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f9272116cc2db49b120f36a2a738ef66 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N17-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 |
| filingDate | 2020-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c42d156a34f6729782d8842fb6f62283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_493753cd6b25053757c0205d5e70e6a1 |
| publicationDate | 2022-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202202336-A |
| titleOfInvention | Multilayer substrate for copper corrosion detection and method for detecting copper corrosion |
| abstract | A multilayer substrate for copper corrosion detection and a method for detecting copper corrosion are provided. The method includes the following steps: providing a multilayer substrate, wherein the multilayer substrate includes a copper layer; forming a gap in the multilayer substrate, wherein a depth of the gap reaches the copper layer; forming a photosensitive resin composition on the multilayer substrate, wherein the photosensitive resin composition covers the gap and is in contact with the copper layer; providing a mask layer on the multilayer substrate, and performing an exposure process; removing the mask layer and performing a development process; performing a post-baking process on the multilayer substrate; and observing the degree of copper corrosion of the gap. |
| priorityDate | 2020-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341 |
Total number of triples: 23.