Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2583bd553a6ef8f66dd0718f5dac4be http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D01F6-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D01D5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D01D5-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/D01F1-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D01F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D01F6-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/D01F6-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate |
2016-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16761be78e6ff2ebb54e012b1228c93f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8989671634d8dff16e3ab93a8fd98d22 |
publicationDate |
2021-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-202146720-A |
titleOfInvention |
Method for forming photosensitive fiber and fiber pattern |
abstract |
An object of the present invention is to provide a method for easily producing complex and fine resist patterns.nThe present invention relates to a fiber comprising a positive or negative photosensitive material. |
priorityDate |
2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |