http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202145410-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10 |
| filingDate | 2021-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_439ba90653ee678ccf7cf9368f2dc908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f0f45e2198a21cf2a95316908dbb3b1 |
| publicationDate | 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202145410-A |
| titleOfInvention | Substrate processing method and substrate processing device |
| abstract | The present invention is a substrate processing method comprising: a substrate holding step of holding a substrate horizontally; a substrate rotation step of rotating the horizontally held substrate around a vertical axis of rotation passing through a central portion of the substrate; and rotating the substrate in a rotated state A treatment liquid supply step for selectively supplying a treatment liquid to the peripheral portion of the substrate; curing or hardening the treatment liquid supplied to the peripheral portion of the substrate to form a treatment film that retains the object to be removed existing in the peripheral portion of the substrate. A forming step and a process film removing step of selectively supplying a process film removal liquid to the peripheral edge of the substrate in a rotating state, and removing the process film in the state of the object to be removed from the peripheral edge of the substrate. |
| priorityDate | 2020-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 72.