Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1291 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J37-0215 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J21-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
filingDate |
2021-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a95f4cef26c8c5106ac588edb4c938 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50f2f6d6ea33fe412335927c173cf95f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_531b948f38674f98a728c6b4fd789996 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34bf92b4872443588f8bc7c2293e65d4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c478dd6e403233aef3a87833542238d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbea641112836a64102e7ffc43809d99 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fa033e0b5a23a1725d4746bfbda6b66 |
publicationDate |
2021-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-202140833-A |
titleOfInvention |
Selective deposition of silicon oxide on dielectric surfaces relative to metal surfaces |
abstract |
Methods for selective deposition of silicon oxide films on dielectric surfaces relative to metal surfaces are provided. A metal surface of a substrate may be selectively passivated relative to the dielectric surface, such as with a polyimide layer or thiol SAM. Silicon oxide is selectively deposited on the dielectric surface relative to the passivated metal surface by contacting the dielectric surface with a metal catalyst and a silicon precursor comprising a silanol. |
priorityDate |
2020-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |