http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202138917-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2021-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2188cce85f627e039f1fa290a99022d8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60ceb97ffa8c2ffcb34d3c17b95dc3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00c1e085b3149eced171823bc3180c1b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_418adfc5c521106563c7c05c50a58134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ab88cb05c6fcf0839cbb446c723335 |
| publicationDate | 2021-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202138917-A |
| titleOfInvention | Method for manufacturing sensitized radiation or radiation-sensitive resin composition, method for pattern formation, and method for manufacturing electronic component |
| abstract | The present invention provides a method for manufacturing an sensitized radiation-sensitive or radiation-sensitive resin composition including steps (1) and (2) in sequence, a pattern forming method using the manufacturing method, and a manufacturing method for electronic components. The manufacturing method of the sensitized radiation-sensitive or radiation-sensitive resin composition, the pattern forming method using the manufacturing method, and the manufacturing method of electronic components in which the aggregation defect caused by the raw material is improved, the step (1) is to put into the container Put a resin, a compound that generates an acid by irradiation with actinic rays or radiation, an acid diffusion control agent, and a solvent. The compound that generates acid by irradiation, the acid diffusion control agent, and the solvent are added with the resin, the compound that generates acid by irradiation with actinic rays or radiation, the acid diffusion control agent, and the solvent. At least one of the solvents. |
| priorityDate | 2020-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.