| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6ed4b363d1d17927ad52dc1875c288fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_635be13a758746c5eee33f2342fa889a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_372021073aa56278e3af95f4971b6c4a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ef1ffd9c50889a13ea004491a8f4606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e91f32f22caac4b2752161d1946ac440
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb7dac06ba01218b0944328a4c451236 |
| publicationDate |
2021-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202137777-A |
| titleOfInvention |
Mems transducing apparatus and method of fabricating the same |
| abstract |
A MEMS transducing apparatus according to the invention includes a substrate, a conductive pad, a transducing device stack, a first polymer layer, a second polymer layer and a third polymer layer. The substrate has an upper cavity formed through. The conductive pad is formed on a first surface of the substrate to cover a first opening of the upper cavity. The transducing device stack is on the conducvtive pad. The first polymer layer is formed on the first surface of the substrate and has a lower cavity formed through. The transducing device stack is exposed within the lower cavity. The third polymer layer is formed on a second surface of the substrate to cover a second opening of the upper caivity. The second polymer layer is formed on the first npolymer layer to cover a third opening of the cavity. |
| priorityDate |
2020-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |