http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202134689-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34c88c465202a4bc7d8388cca9c9bf52 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-20008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01T1-29 |
| filingDate | 2020-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3414d4051c58819187d8bd46b2bb3ddc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_271b1335f38ca6a4708ca9b7a97cca05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_094066fa7fa88aa2fee175880c6eff36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b796902d0f55e17f5e51d2e07786f44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1429208531583ef8c41ad35d12ecae3 |
| publicationDate | 2021-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202134689-A |
| titleOfInvention | Laser produced plasma illuminator with low atomic number cryogenic target |
| abstract | Methods and systems for generating X-ray illumination from a laser produced plasma (LPP) employing a low atomic number, cryogenic target are presented herein. A highly focused, short duration laser pulse is directed to a low atomic number, cryogenically frozen target, igniting a plasma. In some embodiments, the target material includes one or more elements having an atomic number less than 19. In some embodiments, the low atomic number, cryogenic target material is coated on the surface of a cryogenically cooled drum configured to rotate and translate with respect to incident laser light. In some embodiments, the low atomic number, cryogenic LPP light source generates multiple line or broadband X-ray illumination in a soft X-ray (SXR) spectral range used to measure structural and material characteristics of semiconductor structures. In some embodiments, Reflective, Small-Angle X-ray Scatterometry measurements are performed with a low atomic number, cryogenic LPP illumination source as described herein. |
| priorityDate | 2019-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.