| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcdab27b778da1d6b6420d581d0c2fe |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07B2200-13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2018-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6fbb53ed37d9689d1114bfa2762409e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36fb35f39680edbbd46080b76e8326b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f108c255dfac4aeea13998de20f45bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f884b60ba1ce2a34ee2fedc957db8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcfed4dc8927b931c291bd876824ab4c |
| publicationDate |
2021-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202134255-A |
| titleOfInvention |
Organotin clusters, solutions of organotin clusters, and application to high resolution patterning |
| abstract |
Organotin clusters are described with the formula R3Sn3(O2CR')5-x(OH)2+x([mu]3-O) with 0 ≤ x < 2; R = branched or cycloalkyl with 1 to 31 carbon atoms; R' = H or alkyl with 1 to 20 carbon atoms. Three carboxylato ligands are bridging, and two OH ligands are bridging. The remaining two carboxylato ligands are in non-bridging configurations, and the non-bridging carboxylato ligands are exchangeable in solution. Solutions of these clusters are suitable for forming radiation sensitive coatings that can be used to pattern nanometer scale structures. The radiation sensitive coatings are particularly suitable for EUV patterning. |
| priorityDate |
2017-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |