| abstract |
Inorganic particles, a method for preparing same and water dispersant are provided. The inorganic particles according to the present invention are composed of agglomeration of crystalline and amorphous tiny granules, and exhibit a spherical and smooth surface. The spherical appearance, low crystallinity and narrow particle size distribution of the inorganic particles are more advantageous in reducing scratch defects in the CMP process. In addition, the granules on the surface of the inorganic particles provide more active sites, resulting in excellent removal rates, which is advantageous as the next generation abrasives for CMP. |