| abstract |
The present invention adopts a resist composition, which contains: a resin component having a constituent unit derived from a compound represented by the general formula (a01-1) and a constituent unit derived from the compound represented by the general formula (a02-1), and An acid generator component containing a compound having an anion part and a cation part. In formula (a01-1), W 1 is a polymerizable group-containing group, C t is a tertiary carbon atom, R 11 is an unsaturated hydrocarbon group that may have substituents, and R 12 and R 13 are those that may have substituents. A chain saturated hydrocarbon group, the α position of C t is a carbon atom constituting a carbon-carbon unsaturated bond. In formula (a02-1), W 2 is a polymerizable group-containing group, Wa 2 is an aromatic hydrocarbon group, and n2 is An integer of 1~3. |