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filingDate 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8298265bb33c6fba253706cd41c3297a
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publicationDate 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202122524-A
titleOfInvention Self-stopping polishing composition and method
abstract A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material comprises, consists of, or consists essentially of a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, a self-stopping agent, and a cationic polymer.
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