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filingDate 2020-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf8133c686a0fa897efe4ca8b7b63ac3
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publicationDate 2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202122521-A
titleOfInvention Composition and method for dielectric cmp
abstract A chemical mechanical polishing composition for polishing a substrate having a silicon oxygen material comprises, consists of, or consists essentially of a liquid carrier, cubiform ceria abrasive particles dispersed in the liquid carrier, and a cationic polymer having a charge density of greater than about 6 meq/g.
priorityDate 2019-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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