| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcdab27b778da1d6b6420d581d0c2fe |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D35-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22 |
| filingDate |
2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77f1c1f27d6d7b10f187e74ed2388a42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_035e46cbd49a94e2d5ca0a59b153b32e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c2e16707db44da51d00073e05f6fdc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e15fcb3153779fa12b4dcf41dc462d7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c368447c1700fab312953165aa0533a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7567c928eee5b620f63a608e68724ce7 |
| publicationDate |
2021-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202122406-A |
| titleOfInvention |
Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low metal contamination and/or particulate contamination, and corresponding methods |
| abstract |
The purification of monoalkyl tin trialkoxides and monoalkyl tin triamides are described using fractional distillation and/or ultrafiltration. The purified compositions are useful as radiation sensitive patterning compositions or precursors thereof. The fractional distillation process has been found to be effective for the removal of metal impurities down to very low levels. The ultrafiltration processes have been found to be effective at removal of fine particulates. Commercially practical processing techniques are described. |
| priorityDate |
2019-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |