http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202120730-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate | 2020-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de896a94567f09accfbae068860dddaa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_480eb73822d846536f91bc33b32af5ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6d029e1e50476fa40d4c14656eb654f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71f22548ea0a22af874367f33f0c5e24 |
| publicationDate | 2021-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202120730-A |
| titleOfInvention | Indium precursor compound, preparing method of thin film using the same, and substrate prepared thereof |
| abstract | The present invention relates to an indium precursor compound, a method for preparing a thin film using the indium precursor compound, and a substrate prepared therefrom, and more specifically, to an indium precursor compound represented by Chemical Formula 1, and a thin film using the indium precursor compound The preparation method and the substrate prepared thereby. According to the present invention, a uniform thin film can be formed, and productivity can be improved due to the improvement of the deposition rate, while the thermal stability and storage stability are excellent, and the handling is easy. In the aforementioned chemical formula 1, R 1 , R 3 and R 4 are each independently a substituted or unsubstituted alkyl group having 1 to 6 carbon atoms, and R 2 is a linear or branched chain having 1 to 6 carbon atoms The alkyl group, R 5 and R 6 are each independently hydrogen or an alkyl group having 1 to 3 carbon atoms, X is a carbon atom or a hetero atom, and n is an integer of 1 to 3. |
| priorityDate | 2019-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.