http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202115768-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5f60e15501324fd877c613f81d71042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2019-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d0fda9c68b3a0106591ca1a1b7a63f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_315f77ceb367014e22c9660b2a6a7c57 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f7f7f38dbd5147ae211a52eff153bd2 |
| publicationDate | 2021-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202115768-A |
| titleOfInvention | Apparatus for collecting by-product having cooling line of semiconductor manufacturing process |
| abstract | A semiconductor engineering reaction by-product collection device equipped with a cooling flow path to which the present invention is applied is characterized in that it includes an outer shell, and an inner wall is formed to flow into the gas inlet through the upper plate and discharge after adjusting the temperature by a heater. Shell cooling flow path for gas cooling; internal collection tower, assembled with multiple vertical plates and horizontal plates, used to condense and collect reaction by-products from exhaust gas; main cooling flow path adopts a wave structure repeated up and down, through The internal collection tower uses cooling water to uniformly cool the exhaust gas; and, multiple connection pipes use supply pipes and exhaust pipes installed outside the housing to sequentially feed the upper plate cooling flow path, the housing cooling flow path, and the main The cooling flow path circulates to supply and discharge cooling water. |
| priorityDate | 2019-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.