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filingDate 2019-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202115737-A
titleOfInvention Cell current measurement method for three-dimensional memory
abstract A method for measuring memory cell current of a 3D memory, the method includes applying a first test voltage to a source line pad of a peripheral circuit of a 3D memory device, wherein the source line pad is electrically connected to a common source line of a 3D memory array of the 3D memory device, and the peripheral circuit formed on a first substrate and the 3D memory array formed on a second substrate are electrically connected by direct bonding. The method further includes applying a second test voltage to bit line pads of the 3D memory array, wherein the bit line pads and the 3D memory array are formed on opposite sides of the second substrate. In some embodiments, the method includes applying a second test voltage to a power pad, wherein the power pad is electrically connected to a page buffer of a peripheral circuit.
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