http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202115273-A

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filingDate 2020-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93f9d0069b8a78cb9a5ef3e6424926fb
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publicationDate 2021-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202115273-A
titleOfInvention Method of forming a photoresist underlayer and structure including same
abstract Methods of forming structures including a photoresist underlayer and structures including the photoresist underlayer are disclosed. Exemplary methods include forming the photoresist underlayer that includes metal. Techniques for treating a surface of the photoresist underlayer and/or depositing an additional layer overlying the photoresist underlayer are also disclosed.
priorityDate 2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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