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filingDate 2020-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c120aa84088611f8e1744fde4ad9fde2
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publicationDate 2021-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202113142-A
titleOfInvention In-situ control of film properties during atomic layer deposition
abstract Methods of providing control of film properties during atomic layer deposition using intermittent plasma treatment in-situ are provided herein. Methods include modulating gas flow rate ratios used to generate plasma during intermittent plasma treatment, toggling plasma power, and modulating chamber pressure.
priorityDate 2019-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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