| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate |
2020-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe542452b11e57fa513db72ec06e1c85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c676f868ba34594085759252ecb1cf0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001da67d138d94a7e3e57d278f18f84b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_745518a212f82c9e8c793e7eb5f3b582 |
| publicationDate |
2021-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202109592-A |
| titleOfInvention |
Ion gun and ion milling device |
| abstract |
To provide an ion gun that can achieve higher plasma efficiency. The ion gun is equipped with: a first cathode (21) having a disc shape; a second cathode (12) having a disc shape and provided with an ion beam extraction hole (101a); arranged between the first cathode and the second cathode , And has a cylindrical first permanent magnet (14); an anode (23) having a cylindrical area (35a) and a protruding area (25a) provided at one end of the cylindrical area; and the opposite anode is electrically connected to the target The first cathode, the second cathode and the first permanent magnet are electrically insulated between the insulator (26); the cylindrical area of the anode is arranged closer to the inside than the inner diameter of the first permanent magnet, and the protruding area of the anode exceeds The first permanent magnet is arranged at the inner diameter position and opposes the first cathode. |
| priorityDate |
2019-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |