abstract |
An object of the invention is to provide a silicon nitride powder with a total fluorine content within a range from 100 to 1,000 ppm by mass, and a total content of Fe, Al, and Ca within a range from 100 to 1,000 ppm by mass. The invention also provides a method for producing the silicon nitride powder that includes a step of sintering a raw material containing a silicon powder and a fluoride, in which the fluoride content relative to the silicon powder is within a range from 0.1 to 2% by mass, in a mixed atmosphere containing nitrogen and at least one gas selected from the group consisting of hydrogen and ammonia to obtain a sintered product, and a step of treating the sintered product in hydrofluoric acid having a hydrogen fluoride concentration within a range from 10 to 40% by mass. |