http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202102641-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2020-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99ccbdd341a79fa5e8a4d73f7a0516c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e65759a794f26829715254c0c6b6989b |
| publicationDate | 2021-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202102641-A |
| titleOfInvention | CMP composition and method of using the CMP composition |
| abstract | In this specification, for example, in the manufacture of semiconductor devices, compositions and methods for polishing surfaces containing cobalt and Low-k materials are provided. In addition, in this specification, a composition and method for polishing a surface containing metal and/or silicon oxide and Low-k material are provided. One form of CMP composition is used for chemical mechanical polishing of the surface of Low-k materials such as cobalt and black diamond (BD) or SiN. It contains complexing agents, oxidizers, abrasives, Co corrosion inhibitors and ILD inhibition. Agent. Another form of CMP composition is used for chemical mechanical polishing of the surface containing metals such as cobalt, copper, tantalum and/or TEOS-SiO 2 and low-k materials such as black diamond (BD) or SiN. Mixtures, oxidants, abrasives, corrosion inhibitors and non-ionic surfactants. |
| priorityDate | 2019-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 182.