http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202043555-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1229111a198f86af4112ecd730b55cd9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B28-14 |
| filingDate | 2020-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3e01f7c5e5d9f9f778e57e4b9427fb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb9340a9ea73ffaf1a453de5f2630096 |
| publicationDate | 2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202043555-A |
| titleOfInvention | Method for producing polycrystalline silicon |
| abstract | The invention provides a method for producing polycrystalline silicon, comprising introducing a reaction gas containing hydrogen and silane and/or halosilane, into a reaction space of a vapour deposition reactor, wherein the reaction space comprises at least one filament rod which is heated by way of the passage of current and on which silicon is deposited to form a polycrystalline silicon rod. For the determination of the morphology of the silicon rod here - a first resistance value R1 of the silicon rod is determined according to R1 = U/I where U= voltage between two ends of the silicon rod, I= current strength - and a second resistance value R2 of the silicon rod is determined according to R2 = [rho]L/A where [rho]= resistivity of silicon, L = length of the silicon rod, A = cross-sectional area of the silicon rod, and a morphology index M is calculated from the ratio R1/R2, wherein the deposition is controlled in such a way that M has a value from 0.8 to 2.5. |
| priorityDate | 2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.