http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202041653-A

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filingDate 2020-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202041653-A
titleOfInvention Etching composition and etching method using the same
abstract Provided are an etching composition and an etching method using the same, and more particularly, an etching composition for selectively etching a metal nitride film, an etching method of the metal nitride film using the same, and a method of manufacturing a microelectronic device including a process performed using the same.
priorityDate 2019-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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