http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202040657-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J11-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J201-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2020-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_390418b1c673cf6382c7a636fe3e6215 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ff5b720860e15a6d3421818795d808b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6676acb826e82e48899dd73b5e127908 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72e9d54a2d3c04551f1c29e7a469fb23 |
| publicationDate | 2020-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-202040657-A |
| titleOfInvention | Semiconductor device manufacturing method and expandable adhesive tape |
| abstract | An expandable adhesive tape, which is used in a manufacturing method of a semiconductor device. The manufacturing method of the semiconductor device includes a tape expansion step, which is fixed on the expandable tape by heating and extending the expandable tape. The interval between each semiconductor wafer is widened from 100 μm or less to 250 μm or more; the ultraviolet irradiation step is to irradiate the stretched stretchable tape with ultraviolet rays; and the peeling step is to peel off the stretchable tape that has been irradiated with ultraviolet rays from the multiple semiconductor wafers. In the expandable adhesive tape, the peel strength of the expandable adhesive tape before ultraviolet irradiation is 6 N/25 mm or more, and the peel strength after ultraviolet irradiation is 0.4 N/25 mm or less. |
| priorityDate | 2019-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 299.