http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202035794-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_517a04cc4bffc3d216b19f45c9bde10d
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F11-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-44
filingDate 2020-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_004decbad445e5cd7c8dff810d9d7569
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fabd6257d668a1e13467e4482ae81ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_936b6b1530817e3784a39cc48c60ce93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cf6d9d137ba2bf3d5a8245a8e26ebb2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba377995f335992745584d05c0db975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aea694d3311e4abd605876bcee2cb97c
publicationDate 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202035794-A
titleOfInvention Etching composition and etching method using the same
abstract The present invention relates to an etching composition and an etching method of a metal film using the same. In detail, an etching composition that improves the etching characteristics of a single metal film or multiple metal films, an etching method of a metal film using the same, and an etching method including the use of The semiconductor device manufacturing method of the process performed by etching the composition of the present invention.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114164003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113969403-A
priorityDate 2019-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID219608
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86753729
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21057622
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID131409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454421750
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10176137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23994
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407608385
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456725732
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18931850
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415828488
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359967
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583196
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426849379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453375181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452028907
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135398634
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414864024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414170355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6420096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578761
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8705
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426156745
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458437694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447858798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10234160
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450355948
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24846366
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23936
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577475
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1061
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16698
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424599094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8102
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420433585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452411010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454723804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53167
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88626123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407330845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136346341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550719
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138107
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419698070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9221

Total number of triples: 123.