http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202035430-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11d738aa9b5b691f2f5094e7b819ac93
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
filingDate 2020-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b66a7c9733b7a67bb9c66d9810443f54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_371dbefa483e992d85b6da857668eb26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0a95961468bab481d82c5aae94faa6c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9483d8500e1b2e28312965d6fd8a1eff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22fb72bc19e2d81b3d069bba7a9575dc
publicationDate 2020-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202035430-A
titleOfInvention Compositions and methods using same for silicon containing films
abstract Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is provided a precursor of Formula I: as described herein.
priorityDate 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426042550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526596
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426021375
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410494030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410494031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431806199
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154083679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14094712
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4641696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70199
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451241001
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID141161411
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58942961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393650
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415740157
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23137530
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44631890
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12540016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426042551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411276396
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154082908
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411276397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66187
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416010918
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410519838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58942968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18204
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458357694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415836787
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415745625
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58942947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58943018
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88028882
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71317501
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412224215
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6335322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415764333
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71403052
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217328
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID141189096
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410564632
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58942945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407174045
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5256119
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451843740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099232
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58942990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431907459
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450273815
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410567979
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414883664
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327421
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456992176
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518999
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415207654
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22836572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431780832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457277700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58943002
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID102295364
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415778960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411276395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140504694
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID58943003
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6101811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78080
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140504695
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420530640
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57465797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414815146
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431905854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099013
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573201
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13007
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327656
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23657856
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68337
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327482
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414805499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426599202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408721192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431718837
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID560697
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22323806
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431907658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449222711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569951
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4641698
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159151688
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88695427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6329105
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410444294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411460159
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6098404
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449011407
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410567846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431906168
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426813180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5391
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4187062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452584715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431730862
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431650296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410578635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6214
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410550661
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57757046
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450068291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18547402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID137730
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID84745
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61330
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4067399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410555733
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123352212
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947

Total number of triples: 190.