| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68336 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B7-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B7-02 |
| filingDate |
2019-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e429c690fd39b95c288d944dde6826c |
| publicationDate |
2020-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202031475-A |
| titleOfInvention |
Composite sheet for forming protective film and method for producing semiconductor chip |
| abstract |
The present invention relates to a composite sheet for forming protective film comprising a support sheet and a protective film-forming film formed on one surface of the support sheet, wherein the surface resistivity of the outermost layer on the support sheet side of the composite sheet for forming protective film, after expanding the protective film-forming film in the surface direction under conditions of a temperature of 23 DEG C and a thrust speed of 10 mm/s and a thrust height of 20 mm, is 1.0 * 10<SP>11</SP> [Omega]/□ or less. |
| priorityDate |
2018-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |