| abstract |
The laser processing device is provided with a support part, an irradiation part, a moving mechanism, a control part, and an imaging part. The control unit executes a first pre-processing that irradiates a target with laser light along a processing line having a plurality of parallel lines arranged side by side to form a modified area on the target. The imaging unit acquires a first image, and the first image presents a processing state where a modified area is formed along a processing line having a plurality of parallel lines by the first preprocessing. |