http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202030313-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate 2019-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3ecfcac8ccb27321aee1ebb7c8fc012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9db2deb69c85d94d0efb83c51d33eee6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57bacdcd413fc56216929cc7d6b67433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21364f1fab1cd2b90456c96e3fc39a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8646985408a66949b5210f8212d13f10
publicationDate 2020-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202030313-A
titleOfInvention Etching solution
abstract In one aspect, the present invention provides an etching solution capable of increasing the etching rate ratio of a silicon nitride film to a silicon oxide film.nIn one aspect, the present invention relates to an etching solution, which is used in the step of removing the silicon nitride film from a substrate having a silicon nitride film and a silicon oxide film, and a solution containing silicon dioxide and alkali is prepared , Phosphoric acid, and water.
priorityDate 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407330845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6379
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413960276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456367111
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450411023
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410534869
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78401
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID644041
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121686
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415934861
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410578208
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5289183
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3870222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87459816
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448153704
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409060395
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14797
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451105532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452213228
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID312552
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410697574
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407607723
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID78816
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414778117
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451486588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411289843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099

Total number of triples: 61.