| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G12-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D161-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G16-02 |
| filingDate |
2019-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53d7530a5f6fdaf5577f3fae091b77b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ec3da848c145553f34b7dfc1bae84be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec8d19a21b2119fb77ef783d7fd3942 |
| publicationDate |
2020-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202024160-A |
| titleOfInvention |
Polymer and hardmask composition and method of forming patterns |
| abstract |
Disclosed are a polymer including a structural unit obtained by a reaction of a reaction mixture including substituted or unsubstituted indole or a derivative thereof, a first aromatic aldehyde compound having a substituted or unsubstituted C3 to C20 branched alkyl group at the terminal end, and a second aromatic aldehyde compound different from the first aromatic aldehyde compound, a hardmask composition including the polymer, and a method of forming patterns using the hardmask composition. |
| priorityDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |