| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C29-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D71-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C23-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-38 |
| filingDate |
2019-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef07ccc1a5a3bf7b1fda0cad64f26135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_113338fa1713422f3825565f66b907f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c33e95ca14a3cb597eacad3ff816559a |
| publicationDate |
2020-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-202017635-A |
| titleOfInvention |
Purification method of fluorine-containing solvent and purified product of fluorine-containing solvent |
| abstract |
Provided are a purification method for reducing fine particles contained in a fluorine-containing solvent and a purified product of a fluorine-containing solvent in which fine particles are reduced. It is assumed that a method for purifying a fluorine-containing solvent substance includes a filtration step of filtering a fluorine-containing solvent substance containing at least a fluorine-based solvent using a filter made of a material containing fluorine atoms. The filtration rate per effective filtration area of the aforementioned filter at the time of filtration is set to less than 0.2 mL/min.cm 2 . |
| priorityDate |
2018-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |