http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202016157-A

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filingDate 2019-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a0acc6b510ca764de19434633b49404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83e4463c8b5c92f5691fdb09482026a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0327eaf502f9378ae2750cef889d5a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d773c26933f47f09f8fae9fcf14edf1
publicationDate 2020-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202016157-A
titleOfInvention Photosensitive or radiation-sensitive resin composition, resist film, pattern forming method, manufacturing method of electronic device
abstract The present invention provides a photosensitive resin composition having excellent sensitivity to EUV of the formed resist film and excellent LER of the positive pattern formed by EUV exposure. In addition, the present invention provides a resist film, a pattern forming method and an electronic device manufacturing method using the above-mentioned sensitized radiation or radiation sensitive resin composition. The sensitized radiation or radiation sensitive resin composition of the present invention includes a compound that generates an acid by irradiation with actinic rays or radiation, and a resin whose polarity is increased by the action of an acid. The resin includes the general formula (B- 1) Represented repeating unit.
priorityDate 2018-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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