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filingDate 2019-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_071aa39a2746bf7a509259cff1c77632
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publicationDate 2020-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202016070-A
titleOfInvention Ka compound, positive photoresist composition, and photoresist pattern forming method
abstract A novel sulfonium compound has formula (A). A positive resist composition comprising a polymer and a quencher containing the sulfonium compound is improved in resolution and LER during pattern formation and has storage stability. In formula (A), R 1 n, R 2 n, R 3 n, and R 4 nare independently a C 1 n-C 20 nmonovalent hydrocarbon group, p is an integer of 0-5, q is an integer of 0-5, and r is an integer of 0-4.
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