| abstract |
A process of manufacturing a microfluidic device (200, 201, 202, 300, 301, 302, 400, 401, 402) includes the steps of attaching a monolayer of polymer beads onto a first substrate (210, 410) depositing a metal oxide film onto the first substrate (210, 410) over the monolayer of polymer beads, and removing the polymer beads to form an array of metal oxide nano-wells (240, 440) wherein the first substrate (210, 410) is exposed at the bottom of the nano-wells (240, 440). The process also includes depositing an organophosphate layer onto the metal oxide film. The process also calls for depositing a silane coating layer or an acrylate polymer onto the exposed first substrate (210, 410). The method further includes bonding a second substrate (220, 420) to the first substrate (210, 410) to enclose the array of metal oxide nano-wells (240, 440) in a cavity within the first and second substrates (210, 220, 410, 420). |