http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202003455-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2601-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1452
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C63-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D279-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D519-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D215-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-08
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D493-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b407ce24c25aac286c10a2e26b32a888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96dfb78fde169d67126a2f36ad187e54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86
publicationDate 2020-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202003455-A
titleOfInvention Onium salt, chemically amplified positive resist composition, and resist pattern forming process
abstract An onium salt of arenesulfonic acid having a bridged ring-containing group generates a bulky acid having an appropriate strength and controlled diffusion. When a positive resist composition comprising the onium salt and a base polymer is processed by lithography, a pattern of rectangular profile having high resolution and reduced LER is formed.
priorityDate 2018-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID163995001
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID129106044
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422075720
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID151888398
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3013921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456464034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411543941
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75821
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1140
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391465
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7937
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID153978778
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454496526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863740
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526274
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18702422
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419565472
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID13429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559510
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57599495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415816504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410023599
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414962971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431896639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546775
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164092794
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428146536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12507
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418460264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4379756
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426826118
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID83906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411272810
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559592
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422089649
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393647
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465927784
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411222974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414034114
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413552233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419511072
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422094432
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61343
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521657
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453678106
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69415269
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455858454
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417064530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16263
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422220961
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID83906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454973655
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118976674
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453214680
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118976672
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17152
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411402389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433178053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13230
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420207534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457191321
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424354469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456357891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433178057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410586060
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449387974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68156
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414881585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4694097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23135758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID141483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422975274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468149760
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507875
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID13429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3782034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448045709
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID485223053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121419713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429549950
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424435408
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712472
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420768023
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139169933
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457311044
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465783978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457814461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70004
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID149474099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420025039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415790169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393376
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393375
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150712577
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393337

Total number of triples: 194.