| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2019-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd6ec93af655db007cee02f71576152a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69e8458dd1bd6ec55d946983e3f3c649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e99539f7df9d5a50ad4cba8381204edb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_297d23eda8db175852888f20f49482ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826b7e8c9e49f921dc62ecbee0c154dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621bba3beee29aeb8c80d49906ca4756 |
| publicationDate |
2019-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201943880-A |
| titleOfInvention |
Substrate processing method for forming layer on substrate for selective deposition process |
| abstract |
A method for processing a substrate includes a substrate having a top surface and a first self-assembled monolayer (SAM) precursor or a first small molecule monolayer (SMM) precursor, a co-reactant, and a second SAM precursor or A second SMM precursor is contacted to form a first layer on the top surface. A selective deposition method is also disclosed. |
| priorityDate |
2018-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |