http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201943833-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate | 2019-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6408ce21db197c68e79a8c34bdcf134b |
| publicationDate | 2019-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201943833-A |
| titleOfInvention | Surface treatment method for wafer and composition used for the method |
| abstract | The present invention provides a novel composition for steam treatment and a method for surface treatment of a wafer having an Si element using steam of the novel composition. The novel composition is one that has fewer types of water-repellent protective film forming components. It exhibits the same water repellency imparting effect as in the case where the surface of the wafer having Si element is treated with the vapor of the previous composition (there are many types of water repellent protective film forming components), and has excellent chemical stability. The surface treatment method of the wafer of the present invention is characterized in that it is a process of cleaning a wafer having a concave-convex pattern on the surface and at least the Si element in the concave portion, in a state where at least the concave portion of the concave-convex pattern is kept in a liquid state. Supply the vapor of the composition containing the water-repellent protective film-forming component and the solvent to the surface of the concave-convex pattern, change the state of the vapor to a liquid state, and replace the liquid held in the concave portion with the liquid of the composition, so that at least A method for forming a water-repellent protective film on the surface of the concave portion; and the water-repellent protective film-forming component is only a compound represented by the following general formula [1], the solvent contains at least a non-cyclic carbonate, and The amount of the acyclic carbonate is 50 to 100% by mass. [Chemical 5] R 1 x (CH 3 ) 3-x SiN (R 2 ) 2 [1] [In formula [1], R 1 is each independently selected from the group consisting of H group, a hydrocarbon group having 1 to 10 carbon atoms, and a hydrocarbon group having 1 to 10 carbon atoms partially or entirely substituted with a fluorine atom; x It is an integer from 1 to 3. R 2 are each independently selected from the group consisting of methyl, ethyl, and ethylfluorenyl, each of which may be partially or completely substituted with a fluorine atom]. |
| priorityDate | 2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 75.