| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2019-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c7a27dfeb47ab86a0e868dcc4ee55a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_107b99dc5010f2ad7f68dcd542bf559d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6af47c8b7476ae0b58707630793ad4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5788eb47c649c7d10534ceed94ff9cc |
| publicationDate |
2019-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201943829-A |
| titleOfInvention |
Chemical mechanical polishing composition and polishing method |
| abstract |
The present invention provides a chemical mechanical polishing composition that suppresses the generation of ruthenium tetroxide, which is highly toxic to the human body, can perform high-speed polishing of a semiconductor substrate (especially a substrate containing a ruthenium film), and can reduce abrasion damage to a polished surface, and Use its grinding method. The composition for chemical mechanical polishing of the present invention contains (A) titanium oxide-containing particles and (B) an organic acid. Among the (A) titanium oxide-containing particles, the diffraction intensity in the powder X-ray diffraction pattern is maximized. The half-value width of the peak portion of is less than 1 °. |
| priorityDate |
2018-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |