| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcdab27b778da1d6b6420d581d0c2fe |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2019-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36fb35f39680edbbd46080b76e8326b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6fbb53ed37d9689d1114bfa2762409e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcfed4dc8927b931c291bd876824ab4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f884b60ba1ce2a34ee2fedc957db8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f108c255dfac4aeea13998de20f45bd |
| publicationDate |
2019-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201943724-A |
| titleOfInvention |
Tin dodecamer and radiation patternable coating with strong EUV absorption |
| abstract |
Provided is a patterned composition based on an organotin dodecyl polymer having a hydrocarbon-based ligand, an oxygen-based ligand, a hydroxyl-based ligand, and a carboxylic acid-based ligand. Another twelve polymer embodiment has an organotin ligand instead of a hydrocarbyl ligand. Organotin ligands can be incorporated into dodecyl polymers from monomers having the structure (RCC) 3 SnQ, where R is a hydrocarbon group and Q is an alkyl tin moiety, wherein the alkyl tin moiety has a Sn atom with the monomer The bonded carbon has Sn which is bonded to four carbon atoms instead of a quaternary carbon atom. Some or all of the carboxylic acid group and the hydroxyl ligand may be substituted with a fluoride ion. The dodecyl-based patterning composition achieved good EUV patterning results. |
| priorityDate |
2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |