| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-784
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-782
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 |
| filingDate |
2019-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1811c6011b1be8db1c2a45b804664e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c353628f7760eb0450131495e3891cab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d3d8980eb7d5f14f862d149f3e54299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f094cc9b8191e358d30e992b465b84c |
| publicationDate |
2019-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201942089-A |
| titleOfInvention |
Composite sintered body, semiconductor manufacturing device member, and method for manufacturing composite sintered body |
| abstract |
The composite sintered body includes Al 2 O 3 and MgAl 2 O 4 . The content of Al 2 O 3 in the composite sintered body is 95.5 wt% or more. The average sintered particle size of Al 2 O 3 in the composite sintered body is 2 μm or more and 4 μm or less. The standard deviation of the sintered particle size distribution of Al 2 O 3 in the composite sintered body is 0.35 or less. The bulk density of the composite sintered body is 3.94 g / cm 3 or more and 3.98 g / cm 3 or less. The ratio of the crystal phase amount of MgAl 2 O 4 to Al 2 O 3 in the composite sintered body is 0.003 or more and 0.01 or less. Thereby, a composite sintered body having a high withstand voltage and a high volume resistivity can be provided. |
| priorityDate |
2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |