Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-83192 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-20 |
filingDate |
2015-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e429c690fd39b95c288d944dde6826c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60e09b230a1ab2605dfaf99c572af9eb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e367919e6b9d8118d2e3d7f80522f05 |
publicationDate |
2019-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201940622-A |
titleOfInvention |
Sheet for forming protective film and method for manufacturing wafer with protective film |
abstract |
The present invention is a sheet for forming a protective film, comprising a first supporting sheet and a protective film forming film laminated on the first surface side of the first supporting sheet. The protective film forming film includes a hardening material and has the following characteristics: When the protective film-forming film is hardened into a protective film, the breaking strain at 50 ° C of the protective film is 20% or less, and the peak temperature T1 of the loss tangent is 25 ° C to 60 ° C. |
priorityDate |
2014-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |