| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ddb9f3656270bc5410be3679322fead
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2755c806997dfe83a65d0368c30fda8f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B32-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B32-205 |
| filingDate |
2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62c2c0b00c4387e9c01f72bf133a456f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5830351cc54e6024e5aaaaba920e4f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c55ed2eda8e8bfab08ca2817992179ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a8d393b64fe3fcc37e918a67da075b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8115b401f3276eb8957ad73b565a94f |
| publicationDate |
2019-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201938485-A |
| titleOfInvention |
Film containing graphite film |
| abstract |
The previous pellicles have problems in terms of both high extreme ultraviolet (EUV) transmission and uniform EUV transmission. The invention provides a protective film, which has a high EUV by using a graphite film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less as a protective film. Transmittance and EUV transmittance uniformity. |
| priorityDate |
2018-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |