http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201937296-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-083 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2019-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f02a2a66da89d96900d03ac58e43a1e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eea986bf96407cf0822e8973c3924fe5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_841b885f991096829aa89e4d68781b45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41b1f57cd45fff2149f4a1f1492eeb94 |
| publicationDate | 2019-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201937296-A |
| titleOfInvention | Water-repellent protective film forming chemical solution, preparation method thereof, and method for producing surface treated body |
| abstract | The present invention provides a novel water-repellent protective film-forming drug solution comprising a novel catalyst component having various basicities, a method for preparing the same, and a method for producing a surface-treated body using the same. The water-repellent protective film forming liquid of the present invention is used for forming a water-repellent protective film on the surface of a wafer containing germanium on the surface, which comprises (I) a decylating agent, (II) at least one nitrogen-containing compound of the compounds represented by the following general formulas [1] and [2], and (III) Organic solvent. [In the formulas [1] and [2], R 1 is each independently selected from a hydrogen atom, a -C≡N group, a -NO 2 group, and a hydrocarbon group in which a part or all of hydrogen elements may be substituted with a fluorine element, the above hydrocarbon group It may also have an oxygen atom and/or a nitrogen atom, and in the case of containing a nitrogen atom, a non-cyclic structure; R 2 is selected from a hydrogen atom, a -C≡N group, a -NO 2 group, an alkylalkyl group, and a part thereof. Or all hydrogen elements may be substituted with a hydrocarbon group of a fluorine element, and the above hydrocarbon group may have an oxygen atom and/or a nitrogen atom, and in the case of containing a nitrogen atom, a non-cyclic structure is employed] |
| priorityDate | 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 311.