http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201937154-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6b57d4591c2b87bb7b1450eadf70f1b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-3595 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3504 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N25-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0031 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3504 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate | 2018-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_207b55512c1f0824ae2a5a4081c27eba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ccf70fbb00e356b99b403ecd6102edf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53d947af60fd0337eb701f146048b6a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bcb24d4104b18de08d7ba781179619f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c480ef1cb8aca225f262d5c24c51397 |
| publicationDate | 2019-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201937154-A |
| titleOfInvention | Multi-sensor gas sampling detection system for free radical gas and short-lived molecules and using method thereof |
| abstract | The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring free radicals in a radical gas stream and comprising at least one free radical gas generator in communication with at least one gas source. The free radical gas generator can be configured to produce at least one free radical gas stream that can be used in a processing chamber. Thus, the processing chamber is in fluid communication with the free radical gas generator. At least one analysis circuit in fluid communication with the free radical gas generator can be used in the detection and measurement system. The analysis circuit can be configured to receive the radical gas stream for a defined volume and/or flow. In one embodiment, the analysis circuit can be configured to react at least one reagent with the defined volume of free radicals in the radical gas stream, thereby forming at least one chemical species in at least one compound stream. At least one sensor module within the analysis circuit can be configured to measure a concentration of one of the chemical species within the compound stream. One or more flow measurement modules can be in fluid communication with the sensor module. The flow measurement module can be configured to measure the volume of at least one of the compound stream and the free radical stream during use. |
| priorityDate | 2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.